NDLI: Mechanically tri-stable SPDT metal-contact MEMS switch embedded in 3D transmission line

Content Provider	IEEE Xplore Digital Library
Author	Sterner, M. Roxhed, N. Stemme, G. Oberhammer, J.
Copyright Year	2007
Description	Author affiliation: R. Inst. of Technol., Stockholm (Sterner, M.; Roxhed, N.; Stemme, G.; Oberhammer, J.)
Abstract	This paper presents an electrostatically actuated MEMS switch mechanism for a mechanically tri-stable single-pole-double-throw (SPDT) metal-contact switch, which is fully embedded in the signal line of a low-loss 3D-micromachined coplanar-waveguide T-junction. The switch features mechanical tri-stability, i.e. all three stable states of the switch are maintained by an interlocking mechanism without applying external actuation energy. The actuation voltage is only necessary for triggering the transition between the three stable states. In contrast to conventional MEMS switch designs where the switch actuator is built around the transmission line and thus creates a discontinuity in the waveguide, the switch mechanism of the presented design is completely embedded in the signal line of the coplanar waveguide. This, together with a 3D micromachined transmission line design confining the major part of the field lines in the air and not in the substrate, results in very low insertion loss and low reflections. Furthermore, the switches feature active opening which results in very reliable operation of the switches. Single-pole-double-throw metal-contact switches have been fabricated in a very simple, single photolitography mask process, and successfully evaluated from DC to 15 GHz.
Starting Page	427
Ending Page	430
File Size	808378
Page Count	4
File Format	PDF
ISBN	9782874870026
DOI	10.1109/EMICC.2007.4412740
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-10-08
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	European Microwave Association
Subject Keyword	Actuators Transmission lines Coplanar transmission lines Microswitches Transmission line discontinuities Switches Voltage Waveguide discontinuities Coplanar waveguides Signal design
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Mechanically tri-stable SPDT metal-contact MEMS switch embedded in 3D transmission line

Coplanar-waveguide embedded mechanically-bistable DC-to-RF MEMS switches

MEMS Series Switch with Nanometer Wide Gaps in Suspended Coplanar Waveguide Transmission Lines

SPDT RF MEMS switch using a single bias voltage and based on dual series and shunt capacitive MEMS switches

SPDT RF MEMS switch using a single bias voltage and based on dual series and shunt capacitive MEMS switches

Electrostatic Liquid-Metal Capacitive Shunt MEMS Switch

A grounded co-planar waveguide MEMS switch

A Grounded Co-Planar Waveguide MEMS Switch

MEMS, Ka-band single-pole double-throw (SPDT) switch for switched line phase shifters

Mechanically tri-stable SPDT metal-contact MEMS switch embedded in 3D transmission line

Similar Documents

Mechanically tri-stable SPDT metal-contact MEMS switch embedded in 3D transmission line

Coplanar-waveguide embedded mechanically-bistable DC-to-RF MEMS switches

MEMS Series Switch with Nanometer Wide Gaps in Suspended Coplanar Waveguide Transmission Lines

SPDT RF MEMS switch using a single bias voltage and based on dual series and shunt capacitive MEMS switches

SPDT RF MEMS switch using a single bias voltage and based on dual series and shunt capacitive MEMS switches

Electrostatic Liquid-Metal Capacitive Shunt MEMS Switch

A grounded co-planar waveguide MEMS switch

A Grounded Co-Planar Waveguide MEMS Switch

MEMS, Ka-band single-pole double-throw (SPDT) switch for switched line phase shifters

Mechanically tri-stable SPDT metal-contact MEMS switch embedded in 3D transmission line