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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Grauby, S. Salhi, A. Rampnoux, J.-M. Claeys, W. Dilhaire, S. |
| Copyright Year | 2008 |
| Description | Author affiliation: Centre de Phys. Moleculaire Opt. et Hertzienne, Univ. Bordeaux 1, Talence (Grauby, S.; Salhi, A.; Rampnoux, J.-M.; Claeys, W.; Dilhaire, S.) |
| Abstract | We present a scanning imaging system using galvanometric mirrors dedicated to the thermomechanical imaging of microelectronic devices. Using a classical He-Ne laser as source, it constitutes a scanning thermoreflectance imaging set-up leading to images of reflectivity relative variations proportional to the device surface temperature variations. Using an heterodyne interferometric probe, it becomes a scanning interferometric set-up leading to surface displacement images. Both thermoreflectance and interferometric images are presented for two samples. |
| Starting Page | 183 |
| Ending Page | 189 |
| File Size | 758210 |
| Page Count | 7 |
| File Format | |
| ISBN | 9781424433650 |
| DOI | 10.1109/THERMINIC.2008.4669905 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-09-24 |
| Publisher Place | Italy |
| Access Restriction | Subscribed |
| Rights Holder | EDA Publishing Association / THERMINIC2008 |
| Subject Keyword | Temperature measurement Optical interferometry Thermomechanical processes Focusing Optical imaging Microelectronics Mirrors Spatial resolution Pixel Optical surface waves |
| Content Type | Text |
| Resource Type | Article |
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