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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Grigorishin, I.L. Mukhurov, N.I. Kotova, I.F. |
| Copyright Year | 1995 |
| Description | Author affiliation: Inst. of Electron., Acad. of Sci., Minsk, Byelorussia (Grigorishin, I.L.; Mukhurov, N.I.; Kotova, I.F.) |
| Abstract | Among thermionic vacuum integrated circuits (VICs) those on anodic aluminium oxide (AAO) hold particular promise. Previous experimental results have proved the possibility of using such microelectronic components in apparatus designed for operation in extreme environments of space, geology, etc. The main task in making the VICs consists in transforming conventional designs of vacuum electron devices to fit film-based designs and to achieve proper combination of miniature active and passive microcircuit components. This paper addresses one of the promising ways of making VICs. |
| Starting Page | 385 |
| Ending Page | 389 |
| File Size | 609973 |
| Page Count | 5 |
| File Format | |
| ISBN | 078032143X |
| DOI | 10.1109/IVMC.1995.487240 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1995-07-30 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Anodes Cathodes Etching Electrons Aluminum Dielectric substrates Electrodes Circuits Resists Ceramics |
| Content Type | Text |
| Resource Type | Article |
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