NDLI: AVT-RIT-NSF partnership for the development of low voltage thin film phosphor for field emission display devices

Content Provider	IEEE Xplore Digital Library
Author	Kurinec, S.K. Woodard, A.R. Rack, P.D. Potter, M.D.
Copyright Year	1999
Description	Author affiliation: Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA (Kurinec, S.K.)
Abstract	This paper describes the development of a low voltage thin film phosphor material by an alliance between the Rochester Institute of Technology, Advanced Vision Technology Inc., a Rochester based small company and the National Science Foundation (NSF) through the NSF's small business technology transfer (STTR) program. The overall goal of the Phase I program was to develop tantalum zinc oxide (TZO), a novel low voltage blue phosphor that can be deposited in thin film form and integrated with semiconductor device fabrication for flat panel display applications. A lower temperature process for depositing TZO thin films was achieved by rf sputtering from a ZnO-Ta mosaic target. A thorough investigation of the intrinsic blue luminescence showed that the mechanism responsible for luminescence in TZO is metal-to-ligand (Ta 5d/sup 0/-O 2p/sup 6/) radiative transition. Saturated red and green colors were obtained by doping the TZO host lattice with Mn. An exhaustive study of processing parameters, such as annealing, etching, and subsequent deposition processes was done. Successful integration of the TZO phosphor using standard IC processing was realized in working field emission devices.
Starting Page	73
Ending Page	78
File Size	589870
Page Count	6
File Format	PDF
ISBN	0780352408
ISSN	07496877
DOI	10.1109/UGIM.1999.782824
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1999-06-23
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Low voltage Phosphors Sputtering Materials science and technology Semiconductor thin films Luminescence Transistors Companies Small business technology transfer Zinc oxide
Content Type	Text
Resource Type	Article

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