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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Weber, A.H. Weiss, G. Hunklinger, S. |
| Copyright Year | 1991 |
| Description | Author affiliation: Inst. of Appl. Phys., Heidelberg Univ., Germany (Weber, A.H.; Weiss, G.; Hunklinger, S.) |
| Abstract | ZnO-SiO/sub 2/-Si surface acoustic wave (SAW) devices with polycrystalline ZnO films of high quality at a thickness h between 0.3 and 15 mu m were fabricated using the RF-magnetron bias sputtering technique. X-ray diffraction, rocking curves, and SEM microscopy were used to characterize the ZnO layers. The authors studied the propagation loss and the coupling coefficient of three different types of devices: Rayleigh wave devices with ZnO layers h/ lambda approximately=0.4 and h/ lambda approximately=0.04, and Sezawa wave devices. Measurements were performed in the frequency range between 80 and 600 MHz. It was observed that Rayleigh wave devices with a thin ZnO layer have a much lower frequency dependence of the propagation loss than the other two types of SAW devices. At 550 MHz, devices with thin ZnO layers exhibit a propagation loss of only 7 dB/cm, compared to 24 dB/cm for Rayleigh wave devices with a thick ZnO layer, and 14 dB/cm for the Sezawa wave devices. Phase velocity and coupling coefficient as a function of film thickness were examined and are compared with theoretical values. |
| Starting Page | 363 |
| Ending Page | 366 |
| File Size | 350384 |
| Page Count | 4 |
| File Format | |
| DOI | 10.1109/ULTSYM.1991.234187 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1991-12-08 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Zinc oxide Propagation losses Surface acoustic wave devices Scanning electron microscopy Acoustic waves Surface acoustic waves Sputtering X-ray diffraction Acoustic diffraction Frequency measurement |
| Content Type | Text |
| Resource Type | Article |
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