NDLI: Observation of flexural modes in FBAR resonators at MHz frequencies

Content Provider	IEEE Xplore Digital Library
Author	Larson III, J.D. Ruby, R.C. Telschow, K.L.
Copyright Year	2003
Description	Author affiliation: Electron. Res. Labs., Agilent Labs., Palo Alto, CA, USA (Larson, J.D., III)
Abstract	Agilent GHz FBAR resonators are fabricated as suspended membranes of piezoelectric AlN. These vibrate as plate mode resonators in a symmetric or S/sub m,n/ type mode, with the resonant frequencies controlled by the thickness of the membrane, /spl sim/1 micron for GHz frequencies. There also exists a class of anti-symmetric or A/sub m,n/ type flexural plate modes. Resonators operating in this mode exhibit frequencies controlled by both the lateral dimensions and the residual stress in the plate. Unlike the symmetric modes, the A/sub m,n/ modes are much harder to excite by the symmetric FBAR structure, are not easily observed at the electrical port, and occur in the MHz range for structures with lateral dimensions /spl sim/100 microns. The imaging acoustic interferometer is a technique to visualize GHz rate vibrations in FBAR resonators, at sub-nanometer displacements. This paper describes an extension of that technique, which allows MHz rate A/sub m,n/ mode vibrations to be visualized. The first few flexural modes were observed, and will be presented as images made while operating at their respective resonant frequencies. Such modes exhibit a rich structure of nodes and phase reversals of the vertical motion. Over 21 modes were observed in the range 0.5 to 15 MHz. The Q is observed to be /spl sim/100. The flexural modes can be analyzed with a combined plate/drumhead theory, and the resonant frequencies f/sub m,n/ are found to depend on the material properties, static film stress, and the lateral dimensions. This theory yields a regression fit to the data with a goodness of fit coefficient r/sup 2/>0.95.
Starting Page	88
Ending Page	91
File Size	532469
Page Count	4
File Format	PDF
ISBN	0780379225
DOI	10.1109/ULTSYM.2003.1293362
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-10-05
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Film bulk acoustic resonators Resonant frequency Biomembranes Laboratories Visualization Stress Drives Laser modes Lasers and electrooptics Probes
Content Type	Text
Resource Type	Article

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