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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | de Ridder, R.M. Bostan, C.G. van Soest, F.J. Gadgil, V.J. |
| Copyright Year | 2004 |
| Description | Author affiliation: MESA Res. Inst., Twente Univ., Enschede, Netherlands (de Ridder, R.M.; Bostan, C.G.; van Soest, F.J.) |
| Abstract | An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy are discussed. Examples are given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D "woodpile" structure. |
| Starting Page | 260 |
| Ending Page | 265 |
| File Size | 389528 |
| Page Count | 6 |
| File Format | |
| ISBN | 0780383435 |
| DOI | 10.1109/ICTON.2004.1360289 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2004-07-04 |
| Publisher Place | Poland |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Photonic crystals Lattices Lithography Optical waveguides Slabs Optical device fabrication Interference Ion beams Periodic structures Proximity effect |
| Content Type | Text |
| Resource Type | Article |
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