NDLI: High aspect ratio etching of 2D-photonic crystals in InP/InGaAsP/InP heterostructures

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Volume 2 - 2002

Photonic crystals: properties and potential applications

The PICCO project: a survey

Breaking the glass ceiling: hollow OmniGuide fibers

Trapping light behind bars

Enhanced SHG in planar nonlinear waveguide reproducing a 1-D PBG

Development of three-dimensional photonic crystals in the infrared wavelength region by micromanipulation method

Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted deposition

High aspect ratio etching of 2D-photonic crystals in InP/InGaAsP/InP heterostructures

Nanotechnologies for the fabrication of two-dimensional photonic crystals

Photonic crystals on InP membranes: Waveguiding and light emission

Waveguiding and losses in photonic crystals based on suspended membranes

Near-field optical studies of photonic structures

Fabrication of ultra-compact photonic structures in silicon-on-insulator (SOI) using 248 nm deep UV lithography

Photoluminescence of CdTe quantum dots in TiO/sub 2/-based opaline photonic crystals

Modelling of photonic crystal devices

Photonic band gap structures composed of exotic materials

Modeling of 2D photonic crystals by using the method of lines

Resource-saving application of FDTD technique in 3D photonic crystal waveguide calculations

Modelling of multilayer-dielectric-multilayer amplifying Fabry-Perot microinterferometer using the method of single expression

Simulation and design tool for spectral characterization of fiber Bragg gratings

Modeling and process design for laser interference lithography used in fabricating two-dimensional periodic structures

Dispersion-flattened properties of high-index-core Bragg fibers

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Gires-Tournois interferometer correct analysis using the method of single expression

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Tunable dual-wavelength grating-coupled surface-emitting diode laser for THz frequency optoelectronics

EDF laser with double-Bragg grating selection

Elastic excitations in colloidal crystals

Influence of temperature on birefringence and polarization mode dispersion in photonic crystal holey fibers

Wavelength tuning of InGaAs/GaAs laser diodes by the application of high hydrostatic pressure

Photonic crystal fibers-a variety of applications

Dispersion and polarization properties in photonic crystal fibers

Nonlinear effects of pulse propagation in glass and glass-metal microstructured fibers

Transformation of radiation by appearance of a cylindrical plasma inclusion in a waveguide

Analog pattern recognition processors for transparent optical network

Tapered photonic band gap microstrip filters

Parametric interactions in 3-dimensional photonic crystals

Polarization mode dispersion in highly birefringent optical fibers

Fast power transients in Raman fibre amplifiers

Overview and recent developments of the German R&D-initiative KomNet

Theoretical investigation of transverse modes in photonic crystal surface-emitting lasers

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Wavelength scale photonics in COST 268; a recap of work during 1998-2002

Design of high power pump lasers for C-band EDFA amplifiers

All-optical signal processing using a bistable VCSEL

Modeling of uniaxial anisotropic fibers with noncircular cross-section by the method of lines

Method of single expression-advanced powerful tool for computer modelling of wavelength scale nonuniform frequency-selective 1D photonic structures

Asymmetric multiple-quantum-well heterostructures: band-gap engineering conception of optoelectronic elements with widened functionality

Second order nonlinear AlO/sub x//AlGaAs 1D photonic crystals

Photonic crystal fibres- novel fibres, new applications

Volume 1 - 2002

Proceedings of 2001 3rd International Conference on Transparent Optical Networks (IEEE Cat. No.01EX488)

2000 2nd International Conference on Transparent Optical Networks. Conference Proceedings (Cat. No.00EX408)

International Conference on Transparent Optical Networks (Cat. No. 99EX350)

High aspect ratio etching of 2D-photonic crystals in InP/InGaAsP/InP heterostructures

Content Provider	IEEE Xplore Digital Library
Author	Anand, S.
Copyright Year	2002
Description	Author affiliation: Lab. of Semicond. Mater., R. Inst. of Technol., Kista, Sweden (Anand, S.)
Abstract	Summary form only given. The talk will focus on the fabrication of 2D photonic crystals (PCs) in InP/InGaAsP/InP heterostructures by dry etching techniques with specific attention to Ar/Cl/sub 2/ based chemically assisted ion beam etching (CAIBE) and summarizes the ongoing research activities at the Royal Institute of Technology within the EU-IST project PCIC. It is demonstrated that Ar/Cl/sub 2/ CAIBE is a very promising method to obtain high aspect ratio etching of PCs in the InP-based materials. With this process, it is possible to obtain PC-holes as deep as 3 /spl mu/m even for feature (PC-hole) sizes as small as 200-250 nm. The critical role of the sample temperature, hence the chemical etching component, in determining geometric parameters of the PC-holes such as depth, side-wall profile (size and shape) is examined. It is shown that good quality PCs can be etched only when the chemical and physical components in the etch process are balanced. The role of the mask material and the dependence of etch-depth on feature size are discussed. Optical properties of the etched PCs are used to evaluate the quality of the etched PCs and thereby identify the most promising dry etching processes and process conditions. Finally, limitations of reactive ion etching using hydrocarbon-based chemistry for PC fabrication in the InP system will be highlighted.
Sponsorship	Minstry of Infrastructure & State Committee for Sci. Res
File Size	39810
File Format	PDF
ISBN	0780373758
DOI	10.1109/ICTON.2002.1007837
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-04-21
Publisher Place	Poland
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Indium phosphide Personal communication networks Dry etching Photonic crystals Argon Chemical technology Fabrication Ion beams Temperature Shape
Content Type	Text
Resource Type	Article

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