NDLI: Position control of a 3 DOF compliant micro-motion stage

Content Provider	IEEE Xplore Digital Library
Author	Tien-Fu Lu Handley, D.C. Yuen Kuan Yong
Copyright Year	2004
Description	Author affiliation: Sch. of Mech. Eng., Adelaide Univ., SA, Australia (Tien-Fu Lu; Handley, D.C.; Yuen Kuan Yong)
Abstract	This paper focuses on the open-loop and closed-loop position control of a three degree-of-freedom (DOF) compliant micro-motion stage with flexure hinges. This micro-motion stage has a parallel structure for better stiffness and accuracy than serial structures and is driven by three PZT stack actuators. It was discussed in the authors' previous paper that due to the limitation of current modeling methods for compliant mechanisms the derived kinematic model is not able to accurately describe the behavior of the investigated micro-motion stage. Therefore, an experimentally determined constant Jacobian matrix is used to relate the extensions of PZTs and the end-effector movement for position control. With the use of the experimentally determined Jacobian in open-loop control, the micro-motion stage is proved able to achieve good positioning accuracy. Nevertheless, the positioning accuracy is significantly improved by incorporating end-effector closed-loop control.
Starting Page	1274
Ending Page	1278
File Size	661303
Page Count	5
File Format	PDF
ISBN	0780386531
DOI	10.1109/ICARCV.2004.1469029
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-12-06
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Position control Jacobian matrices Fasteners Kinematics Open loop systems Mechanical engineering Couplings Friction Piezoelectric actuators Biological cells
Content Type	Text
Resource Type	Article

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