NDLI: Electrical investigation of transparent thin films based on TiO doped with palladium and vanadium

Content Provider	IEEE Xplore Digital Library
Author	Sieradzka, K. Prociow, E.L. Domaradzki, J. Mazur, M. Kaczmarek, D.
Copyright Year	2009
Description	Author affiliation: Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372, Poland (Sieradzka, K.; Prociow, E.L.; Domaradzki, J.; Mazur, M.; Kaczmarek, D.)
Abstract	Relatively new field in optoelectronics named transparent electronics contributed to a development of potential applications based on transparent thin film oxide conductors and semiconductors. Such thin films may be applied in flat panel displays, solar cells and smart coatings for architectural glass. The attractiveness of thin oxide films depends mainly on specific applications, although both low resistivity and low optical absorption are always demanded. Moreover, the need for prepearation of semiconducting oxide materials with n-type and p-type of electrical conduction is meaningful for transparent junction realization. In this work the TiO thin films doped with different amount of Pd and V have been investigated. The dopants were incorporated into TiO matrix during magnetron sputtering deposition of the thin films. For characterization of the fabricated thin films the optical and electrical measurements were applied. The optical results show that different amount of dopant have not influenced transparency of prepared TiO thin films in the case of V doping, while the thin films with Pd become opaque with the increase in the Pd amount. Except the high transparency, the doped TiO thin films have semiconducting properties at room temperature and were able to form junctions with silicon substrate. In summary the thin films based on TiO with the best optical and electrical parameters have been selected.
Starting Page	72
Ending Page	76
File Size	1215125
Page Count	5
File Format	PDF
ISBN	9781424443048
DOI	10.1109/STYSW.2009.5470299
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-25
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Transistors Optical films Semiconductor thin films Sputtering Semiconductivity Conductive films Flat panel displays Photovoltaic cells Coatings Glass
Content Type	Text
Resource Type	Article

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