NDLI: MEMS Power Receiver using Piezoelectric Cantilever Beams and Interdigitated Electrodes

Content Provider	IEEE Xplore Digital Library
Author	Bor-Shun Lee Jyun-Jhang He Wen-Jong Wu Wen-Pin Shih
Copyright Year	2006
Description	Author affiliation: Nat. Taiwan Univ., Taipei (Bor-Shun Lee; Jyun-Jhang He; Wen-Jong Wu)
Abstract	Over the years, there has been a growing interest in the field of power transmission technologies for low-power electronic devices, such as wireless sensor networks and biomedical sensor applications. Among all possible energy sources, the mechanical vibrations have been considered as a potential choice for power transmission in a wide variety of applications. This paper presents the development of a piezoelectric MEMS transducer which has the ability to receive mechanical energy of ambient vibrations from an external generator and transform it into electrical energy that can be used in energy storage applications. The piezoelectric MEMS transducer comprises of a beam structure based on the silicon wafer and a pair of interdigitated electrodes placed in between the lead zirconate titanate $(Pb(Zr,Ti)O_{3},$ PZT) material and the beam structure. This transducer transforms mechanical strain energy into electrical charge with the $d_{33}$ mode of PZT. An optional proof mass can be built at the tip of the beam to adjust the structure resonant frequency of the transducer for most adaptable frequency matching to the various vibration generators. A theoretical model is also presented to investigate the relations between the charge generation ability and the design parameters of the transducer. To optimize the fabrication, a customized PZT deposition chamber which could deposit PZT thin film up to tens micron in minutes was used to deposit the piezoelectric layer on the beam structure.
Starting Page	3227
Ending Page	3232
File Size	3959173
Page Count	6
File Format	PDF
ISBN	1424400996
DOI	10.1109/ICSMC.2006.384614
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-10-08
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Structural beams Piezoelectric transducers Vibrations Power transmission Biomedical electrodes Low power electronics Wireless sensor networks Biosensors Biomedical transducers
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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