NDLI: Retrofitting a length measuring machine for linear scale calibration

Content Provider	IEEE Xplore Digital Library
Author	Hermann, Gyula Benko, Gyorgy Nagy, Attila
Copyright Year	2009
Description	Author affiliation: Budapest Tech, Bécsi út 96/B, H-1034, Hungary (Hermann, Gyula) \|\| NanoTech Ltd., Völgy utca 13/A, H-1021 Budapest, Hungary (Benko, Gyorgy; Nagy, Attila)
Abstract	The aim of the project, described in this paper, is to retrofit a Zeiss length measuring machine for the calibration of linear scales, with a pitch distance of a few micrometers. The retrofitting consists of optics, equipped with a CCD camera, for capturing the line sizes and distances, an appropriate illumination system, a motion system carrying the scale and providing linear motion at constant speed. The paper starts with discussing the various definitions of the pitch distance. From these definitions simple algorithms, to determine the pitch distance, are derived. The main point is to minimize the effect of non-linearity and diffraction, by using appropriate optics and illumination, hereby improving measurement accuracy. The carriage carrying the scale is driven by ultrasonic piezomotor providing nanometer resolution. The displacement is measured by an HP laser interferometer. For higher resolution the CCD camera system can be replaced by a near field microscope.
Starting Page	79
Ending Page	82
File Size	209576
Page Count	4
File Format	PDF
ISBN	9781424441112
DOI	10.1109/INES.2009.4924741
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-04-16
Publisher Place	Barbados
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Length measurement Calibration Optical interferometry Charge coupled devices Charge-coupled image sensors Lighting Ultrasonic variables measurement Optical diffraction Displacement measurement Microscopy
Content Type	Text
Resource Type	Article

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