NDLI: On Electrical Modeling of Imperfect Diffusion Patterning

Content Provider	IEEE Xplore Digital Library
Author	Tuck-Boon Chan Gupta, P.
Copyright Year	2010
Abstract	Imperfect lithographic patterning leads to nonrectangular polysilicon and diffusion layers. Though electrical modeling of polysilicon rounding has received much attention, same is not true for diffusion. In this work, we propose the first physically derived electrical model for diffusion rounding. We show that channel length, effective device width and Vth of the device are affected. The model shows that effect of rounding is not symmetric with respect to source and drain. Further, we extend the model to handle polysilicon and diffusion patterning imperfections together. The model can be calibrated using circuit simulation instead of silicon/TCAD. The average errors (as verified with TCAD simulation) of the model are 1.6% and 1.7% for TCAD and SPICE based calibration respectively. The average error for the combined poly and diffusion rounding model is 2.7%. As a simple circuit application, we show that poly-to-diffusion spacing rule can be shrunk to reduce cell area by 5% without any delay or leakage penalty.
Starting Page	224
Ending Page	229
File Size	400783
Page Count	6
File Format	PDF
ISBN	9781424455416
ISSN	10639667
e-ISBN	9781424455423
DOI	10.1109/VLSI.Design.2010.23
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-01-03
Publisher Place	India
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	MOSFETs Transistors Equations Circuit simulation Silicon SPICE Semiconductor device modeling CMOS technology Lithography Very large scale integration imperfect diffusion patterning non-rectangular mosfet active layer rounding trapezoid mosfet
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering Hardware and Architecture

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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