NDLI: Semiconductor track system simulator

Content Provider	IEEE Xplore Digital Library
Author	Seung Bong Hong Doo Yong Lee Hyun Joong Yoon
Copyright Year	2000
Description	Author affiliation: Dept. of Mech. Eng., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea (Seung Bong Hong)
Abstract	Presents a simulator of track systems in semiconductor fabrication. A track system is a clustered set of equipment for photolithographic processes with complex and diverse process flows, and its layout can be changed according to the production demand. Simulation is required to evaluate the performance of proposed track systems and their control policies. We have developed a virtual 3D dynamic simulator of track systems, which consists of four modules, viz. a simulation module, a scheduling module, a performance analysis module and a graphical user interface (GUI) module. The simulation module is constructed using a commercial discrete event system simulation software package called AutoMod. The scheduling module includes dispatching rules and input release rules. Users enter track parameters and empirical data via the GUI module. Based on the simulations, users can select the best-performing scheduling rule for the targeted track systems and reconfigure the layout. Users can also easily grasp the entire situation through such virtual 3D simulations.
Sponsorship	Raytheon
Starting Page	1036
Ending Page	1040
File Size	746289
Page Count	5
File Format	PDF
ISBN	0780370872
ISSN	1062922X
DOI	10.1109/ICSMC.2001.973055
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2001-10-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Graphical user interfaces Analytical models Discrete event simulation Target tracking Fabrication Flow production systems Control system synthesis Vehicle dynamics Dynamic scheduling Performance analysis
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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