NDLI: Intrinsic improvement of diffraction-limited resolution in optical MEMS fourier-transform spectrometers

Content Provider	IEEE Xplore Digital Library
Author	Sabry, Y.M. Omran, H. Khalil, D.
Copyright Year	2014
Description	Author affiliation: Fac. of Eng., Ain Shams Univ., Cairo, Egypt (Sabry, Y.M.; Omran, H.; Khalil, D.)
Abstract	High resolution MEMS FTIR spectrometers are now of growing interest on both the academic and industrial levels. Such spectrometers are characterized by their small compact size, high speed of response and the use of optical fiber coupling. The main optical MEMS engine of the spectrometer is an interferometer with a moving mirror displaced using a MEMS actuator. The resolution of the FTIR spectrometer is related to the travel distance of the moving mirror but with a lower limit restricted by the divergence angle of the input light to the spectrometer; an effect called self-apodization. In this work, we analyze this effect within the MEMS systems, in which the size of the optical components is in the order of 50-300 μm limited by the microfarbication technology. We show analytically and experimentally that the resolution is intrinsically improved 5-10 times relative to the values directly predicted by the input light divergence angle.
Sponsorship	IEEE Egypt Sect.
Starting Page	326
Ending Page	333
File Size	747783
Page Count	8
File Format	PDF
ISBN	9781479938209
e-ISBN	9781479938216
DOI	10.1109/NRSC.2014.6835093
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-04-28
Publisher Place	Egypt
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical fibers Optical interferometry Micromechanical devices Apertures Optical fiber devices self-apodization Micro spectrometer MEMS interferometer multimode optical fiber
Content Type	Text
Resource Type	Article

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