NDLI: A constant flow-rate microvalve actuator based on silicon and micromachining technology

Content Provider	IEEE Xplore Digital Library
Author	Park, S. Ko, W.H. Prahl, J.M.
Copyright Year	1988
Description	Author affiliation: Electron. Design Center, Case Western Reserve Univ., Cleveland, OH, USA (Park, S.; Ko, W.H.; Prahl, J.M.)
Abstract	Computer modeling and prototype testing of a nearly constant flow-rate microvalve which requires no power consumption to maintain the flow rate has been presented. The parameters of the valve have been obtained by mathematical models with correction factors from the experimental trials. These parameters allow for general design guidelines for a rectangular, thin diaphragm microvalve. To have the experimental data agree with the theoretical model, using the method of least squares, for the prototype rectangular silicon valve described the correction coefficient is 0.45-0.55 for a diaphragm aspect ratio for L/W=2 and 0.8-0.9 for an aspect ratio of L/W=4. The correction factor accounts for the simplified diaphragm deflection equations, incorrect estimated elastic modulus of the diaphragm, and variation in the diaphragm material thickness.
Starting Page	136
Ending Page	139
File Size	233594
Page Count	4
File Format	PDF
DOI	10.1109/SOLSEN.1988.26460
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1988-06-06
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microvalves Actuators Silicon Prototypes Valves Testing Energy consumption Mathematical model Guidelines Least squares methods
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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