NDLI: A novel method of fabricating 3D spot-size converter on (111) SOI

Content Provider	IEEE Xplore Digital Library
Author	Na Fang Zhifeng Yang Aimin Wu Jing Chen Miao Zhang Shichang Zou Xi Wang
Copyright Year	2008
Description	Author affiliation: State Key Lab. of Functional Mater. for Inf., Chinese Acad. of Sci., Shanghai (Na Fang; Zhifeng Yang; Aimin Wu; Jing Chen; Miao Zhang; Shichang Zou; Xi Wang)
Abstract	We present a novel method to realize 3D adiabatically Spot-Size Converter (SSC) structures by standard silicon micromachining technics, for efficient coupling from single-mode fiber or free-space to silicon photonic chip. The SSC is comprised of I/O waveguides and a 3D tapered coupler on silicon-on-insulator (SOI) substrate. The dimensions are decreased linearly in both vertical and horizontal directions from input facet to output facet. The slope in vertical direction was originated from the angle between the surface of (111) SOI wafer and the real (111) crystal plane. Fabrication of the device has large process tolerance, and its effectiveness was conformed by optical loss measurement.
Starting Page	79
Ending Page	80
File Size	255495
Page Count	2
File Format	PDF
ISBN	9781424419548
ISSN	1078621X
DOI	10.1109/SOI.2008.4656303
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-06
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical waveguides Etching Silicon Three dimensional displays Silicon on insulator technology Electromagnetic waveguides Surface treatment
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in