NDLI: In depth resolved analysis of SIMOX materials by optical characterization techniques

Content Provider	IEEE Xplore Digital Library
Author	Perez-Rodriguez, A. Martin, E. Samitier, J. Jimenez, J. Morante, J.R. Hemment, P.L.F. Homewood, K.P.
Copyright Year	1991
Description	Author affiliation: Dept. Fisica Aplicada i Electron., Barcelona Univ., Spain (Perez-Rodriguez, A.)
Abstract	Beveled SIMOX (separation by implanted oxygen) samples obtained by different processes have been analyzed by Raman scattering and Fourier transform infrared (FTIR) reflection-absorption spectroscopy techniques. In both cases, measurements have been made with a microscope, which made it possible to directly observe the different regions of the silicon and buried oxide layers on the structures. Micro-Raman measurements performed with an excitation wavelength of 457.9 nm (penetration depth of about 300 nm) show the existence of structural differences in the Si regions of the different samples, related to the technological processes. The structural characterization of the buried oxides has been carried out by infrared (IR) microscope reflection measurements. A comparison of the characteristics of the TO/sub 3/-LO/sub 3/ and TO/sub 4/-LO/sub 4/ vibrational peaks in the IR spectra gives information about the structural characteristics of the oxides.
Starting Page	110
Ending Page	111
File Size	152129
Page Count	2
File Format	PDF
ISBN	0780301846
DOI	10.1109/SOI.1991.162881
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1991-10-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical materials Infrared spectra Spectroscopy Wavelength measurement Raman scattering Microscopy Optical scattering Fourier transforms Silicon Performance evaluation
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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