NDLI: Mass sensing with resonating ultrathin double beams

Content Provider	IEEE Xplore Digital Library
Author	Ono, T. Wang, D.F. Esashi, M.
Copyright Year	2003
Description	Author affiliation: Graduate Sch. of Eng., Tohoku Univ., Sendai, Japan (Ono, T.; Wang, D.F.)
Abstract	This paper reports on mass sensing with 33-nm-thick single crystalline cantilevers by a double-beam laser Doppler vibrometer. The resonant frequency of an oscillating thin cantilever beam is very sensitive to a loaded mass. However, the drift of the resonance, due to gas adsorption and mechanical instability, limits the minimum detectable mass in general. Two cantilevers for sensing and its reference will be compensate their influences. Two cantilevers were self-oscillated by electrostatic actuation at a different resonant frequency. On the end of one cantilever, a 10-pico-g sample (a particle of organosilicon monomer) was mounted, and thermogravimetry of the sample using the two cantilevers was demonstrated. The cantilevers were heated up by a heater in vacuum, and the mass change was detected from the change of its resonant frequency. Exact temperature change can be estimated from the resonant frequency change of the reference cantilever. The derivative of the frequency change, corresponding to desorbed mass, clearly shows a peak at about 370/spl deg/C.
Sponsorship	IEEE Sensors Council
Starting Page	825
Ending Page	829
File Size	304259
Page Count	5
File Format	PDF
ISBN	0780381335
DOI	10.1109/ICSENS.2003.1279058
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-10-22
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonant frequency Laser beams Crystallization Gas lasers Vibrometers Structural beams Resonance Electrostatic actuators Temperature Frequency estimation
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in