NDLI: A highly automated testing facility for calibration and performance testing of mass flow controllers

Content Provider	IEEE Xplore Digital Library
Author	McKnight, T.
Copyright Year	1995
Description	Author affiliation: Mass Flow Controller Dev. Lab., Oak Ridge Nat. Lab., TN, USA (McKnight, T.)
Abstract	A highly automated testing laboratory has been developed at the Oak Ridge National Laboratory towards the goal of improving the mass flow controller (MFC) and its impact on the semiconductor community. Developed initially for SEMATECH, this facility has validated and implemented many of the SEMATECH Semaspec test methods for mass flow controllers, which are now becoming SEMI standards. The facility features several testbeds for the evaluation of MFC reliability, accuracy, surrogate gas factors, and process gas calibrations, in addition to many other aspects of mass flow controllers and other low flow devices. The facility is highly automated, with many test methods being performed in a virtually "hands-off" mode. Integral in this facility is the gravimetric calibrator, a true mass flow device which allows the rapid calibration of flow devices against hazardous and corrosive process gases to the level of approximately 0.3% of reading. The capabilities of this facility have been demonstrated through baseline MFC performance for the SEMI-SEMATECH member companies. The facility is now being opened as a Department of Energy National User Facility, enabling MFC manufacturers, equipment suppliers, and end users access to all facility capabilities for development and evaluation work of the MFC.
Starting Page	157
Ending Page	160
File Size	855846
Page Count	4
File Format	PDF
ISBN	0780329287
DOI	10.1109/ISSM.1995.524380
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1995-09-17
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Automatic testing Calibration Automatic control Weight control Laboratories Semiconductor device testing Standards development Performance evaluation Gases Manufacturing
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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