NDLI: Nanoelectromechanical systems for biology: Where to go from now?

Content Provider	IEEE Xplore Digital Library
Author	Nicu, L. Leichle, T.
Copyright Year	2012
Description	Author affiliation: LAAS-CNRS, Toulouse, France (Nicu, L.; Leichle, T.)
Abstract	Despite the fact that bio-nano-electromechanical systems (bioNEMS) are considered as the ultimate mechanical systems for complex biosensing, one still has to demonstrate that highly sensitive nanomechanical elements can be readily mass-produced in terms of both fabrication and biofunctionalization technologies. In this paper, we discuss a fundamental change of technological paradigm based on nanoprinting-techniques which implementation will successfully address all the bioNEMS-related issues at once. The choice of the nanoprinting-based techniques as a generic way to both fabricating (by transfer-printing) and functionalizing (by nano-contact printing) ultra-dense arrays of NEMS (thousands per $cm^{2})$ could lead to easy-to implement, flexible recipes for front-end and back-end processing while avoiding a long series of technological steps which most of the times dramatically impacts the yield, and subsequently the cost of fabrication.
Starting Page	51
Ending Page	56
File Size	751532
Page Count	6
File Format	PDF
ISBN	9781467307376
ISSN	1545857X
e-ISBN	9781467307383
DOI	10.1109/SMICND.2012.6400697
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-10-15
Publisher Place	Romania
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Nanoelectromechanical systems Nanobioscience Biosensors Surface treatment Nanostructures Nanoscale devices Probes
Content Type	Text
Resource Type	Article

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