NDLI: MEMS and robotics: promises and problems

Content Provider	IEEE Xplore Digital Library
Author	Will, P.
Copyright Year	2000
Description	Author affiliation: Inf. Sci. Inst., Univ. of Southern California, Marina del Rey, CA, USA (Will, P.)
Abstract	Microelectromechanical systems (MEMS) have caught the imagination of the robot community as well as the general public. The excitement and promise of small, fast, capable micromechanical technology for robotics lies in being able to make extremely small machines that may be used for a variety of purposes ranging from small systems for space exploration to the wilder shores of tiny, implantable medical devices. The promise of MEMS is most evidently realized in the development of a wide variety of sensors that may be used to enhance the functionality of existing, more conventional robots, but MEMS capabilities in actuators are on the horizon, leading to the possibility of new robotics devices and systems. The paper discusses MEMS devices, the processes of making them, and some of their robotic applications, and ends with some open problems and challenges.
Starting Page	938
Ending Page	946
File Size	880735
Page Count	9
File Format	PDF
ISBN	0780358864
ISSN	10504729
DOI	10.1109/ROBOT.2000.844169
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-04-24
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Orbital robotics Medical robotics Robot sensing systems Microelectromechanical systems Space technology Space exploration Implantable biomedical devices Sensor systems Actuators
Content Type	Text
Resource Type	Article
Subject	Artificial Intelligence Control and Systems Engineering Electrical and Electronic Engineering Software

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