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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Min-Chul Sun Wandong Kim Jeong-Hoon Oh Kyung-Chang Ryoo Sang Wan Kim Garam Kim Hyun Woo Kim Sunghun Jung Dae Woong Kwon Ji Soo Jang Jang Hyun Kim Byung-Gook Park |
| Copyright Year | 2010 |
| Description | Author affiliation: Inter-university Semiconductor Research Center and School of Electrical Engineering Seoul National University, S. Korea (Min-Chul Sun; Wandong Kim; Jeong-Hoon Oh; Kyung-Chang Ryoo; Sang Wan Kim; Garam Kim; Hyun Woo Kim; Sunghun Jung; Dae Woong Kwon; Ji Soo Jang; Jang Hyun Kim; Byung-Gook Park) |
| Abstract | In this study, the influence of sidewall thickness on the threshold voltage and on-current of L-shaped Impact-ionization metal-oxide-semiconductor transistor (I-MOS) is investigated. For the sidewall thickness in the range of 10 nm to 20 nm, the devices of thicker sidewall show lower on-current and higher threshold voltage. This is because the electron concentration between the channel and the most active ionization region rapidly decreases as the sidewall gets thicker. As a result, a precise control of sidewall formation is needed in fabricating L-shaped I-MOS devices. Also, obtaining the required on-current and reliability at the same time, as well as suppressing device variability due to sidewall thickness variation, is expected to be challenging. |
| Starting Page | 250 |
| Ending Page | 253 |
| File Size | 574289 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424470334 |
| ISSN | 19449380 |
| e-ISBN | 9781424470327 |
| e-ISBN | 9781424470310 |
| DOI | 10.1109/NANO.2010.5697891 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2010-08-17 |
| Publisher Place | Korea (South) |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Logic gates Threshold voltage Semiconductor process modeling Transistors Dielectrics Impact ionization |
| Content Type | Text |
| Resource Type | Article |
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