NDLI: Experimental Generation Of A Steady-state Glow Discharge At Atmospheric Pressure

Content Provider	IEEE Xplore Digital Library
Author	Roth, J.R. Laroussi, M. Chaoyu Liu
Copyright Year	1992
Description	Author affiliation: University of Tennessee (Roth, J.R.)
Abstract	In industrial plasma engineering, a steady-state atmospheric glow discharge would allow many surface modification and other plasma processing operations to be carried out under atmospheric conditions, rather than in expensive vacuum systems which enforce batch processing. In this paper, we report some encouraging results of an experimental program conceived independently of the work reported by Kanda, et al. (Ref 1). Our experiments were conducted on an experimental apparatus shown schematically in Figure 1. A Parallel Plate plasma reactor with square electrodes 25 cm on a side, covered with an insulating surface (rubber or glass), and with variable spacing, was set up in an enclosed box which made it possible to control the type of working gas used. This reactor was energized by a very specialized RF power supply capable of supplying up to 5 kilowatts of RF power at rms voltages up to 5 kilovolts, and over a frequency range from 1kHz to 100 kHz.
Starting Page	170
Ending Page	171
File Size	183992
Page Count	2
File Format	PDF
ISBN	078030716X
DOI	10.1109/PLASMA.1992.697987
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1992-06-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Steady-state Glow discharges Plasma materials processing Electrodes Helium Plasma measurements Cathodes Atmosphere Plasma transport processes Frequency
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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