NDLI: ALD Al2O3 based nanolaminates for solar cell applications

Content Provider	IEEE Xplore Digital Library
Author	Simon, D.K. Jordan, P.M. Knaut, M. Chohan, T. Mikolajick, T. Dirnstorfer, I.
Copyright Year	2015
Description	Author affiliation: Nanoelectronic Mater. Lab. gGmbH, Dresden, Germany (Simon, D.K.; Jordan, P.M.; Chohan, T.; Mikolajick, T.; Dirnstorfer, I.) \|\| Inst. fur Halbleiter- und Mikrosystemtechnik, Tech. Univ. Dresden, Dresden, Germany (Knaut, M.)
Abstract	$Al_{2}O_{3}$ based nanolaminates provide new functionalities for silicon surface passivation layers in future high-efficient cell concepts. This work presents two different applications: (I) Symmetrical passivation layers for application on p- and n-type Si are realized with thin $HfO_{2}$ and Al-doped $SiO_{2}$ interface layers between $Al_{2}O_{3}$ and Si. These stacks have excellent chemical passivation but zero fixed charges. Consequently, no surface inversion layer is formed in n-type Si and low surface recombination velocities below 2 cm/s are achieved in low injection. (II) Conductive passivation layers are realized with $Al_{2}O_{3}-TiO_{2}$ double and multilayers. The optimum material combination and post deposition treatment results in a current density of 0.5 $mA/cm^{2}$ at 10 mV with a surface recombination velocity of about 15 cm/s. This conductivity is more than eight orders of magnitude higher than for pure $Al_{2}O_{3}.$
Starting Page	1
Ending Page	6
File Size	2775987
Page Count	6
File Format	PDF
e-ISBN	9781479979448
DOI	10.1109/PVSC.2015.7356401
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-06-14
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Passivation Aluminum oxide Silicon Hafnium compounds Nonhomogeneous media Current density Conductivity interface layer surface passivation charge carrier lifetime Al2O3 ALD fixed charges conductive passivation
Content Type	Text
Resource Type	Article

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