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Content Provider | IEEE Xplore Digital Library |
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Author | Moonchul Lee Insang Song Jea-Shik Shin Hosoo Park Sang Uk Son Chul-Soo Kim Duck-Hwan Kim Jing Cui Yujie Ai |
Copyright Year | 2012 |
Description | Author affiliation: Samsung Advanced Institute of Technology, Yong-in, 446-712, Republic of Korea (Moonchul Lee; Insang Song; Jea-Shik Shin; Hosoo Park; Sang Uk Son; Chul-Soo Kim; Duck-Hwan Kim; Jing Cui; Yujie Ai) |
Abstract | We investigate the performance of aluminum nitride (AlN) resonator based bulk acoustic wave (BAW) structure made with air edge reflector and gold (Au) edge electrode. BAW Resonators have been fabricated, some devices using a thick film of e-beam evaporated gold as edge electrodes at the border of the resonator on bottom, top electrode. The air reflectors provided at the border of the resonator suppress the acoustic wave leakage through lateral direction. We have developed the simulation and measurement for the improving of resonator quality. The influence of the frame width on resonator surface after applied the air edge reflector and the gold edge electrode in the performance of the BAW resonators is analyzed. The Q (Q-factor at anti-resonance frequency) and the effective electro-mechanical coupling coefficient $(kt^{2})$ which is essential to achieve low loss and wide band-width of RF filters is increased by 19 % and 3.4 %, respectively. Also, Insertion loss at S parameter is improved significantly from −0.095 dB to −0.041 dB. |
Starting Page | 520 |
Ending Page | 522 |
File Size | 890080 |
Page Count | 3 |
File Format | |
ISBN | 9781457713309 |
e-ISBN | 9781457713323 |
e-ISBN | 9781457713316 |
DOI | 10.1109/APMC.2012.6421650 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2012-12-04 |
Publisher Place | Taiwan |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Electrodes Gold Acoustic waves Radio frequency Resonator filters Insertion loss rf filter bulk acoustic wave resonator air edge reflector spurious resonance au electrode border frame |
Content Type | Text |
Resource Type | Article |
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