NDLI: Outgassing and surface properties of TiN coated SNS ring vacuum chambers

Content Provider	IEEE Xplore Digital Library
Author	He, P. Hseuh, H.C. Mapes, M. Todd, R. Hilleret, N.
Copyright Year	2003
Description	Author affiliation: Collider-Accelerator Dept., Brookhaven Nat. Lab., Upton, NY, USA (He, P.; Hseuh, H.C.; Mapes, M.; Todd, R.)
Abstract	The stainless steel vacuum chambers of the 248 m Spallation Neutron Source (SNS) accumulator ring are being coated with /spl sim/ 100 nm of titanium nitride (TiN) to reduce the secondary electron yield (SEY). The coating is produced by DC magnetron sputtering using a long cathode imbedded with permanent magnets. The outgassing rates of several SNS half-cell chambers, with and without TiN coating, and before and after in-situ bake, were measured. The SEY of the coated chamber coupons were also measured with primary electron energy of 50-3000 eV. By varying the coating parameters, films of different surface roughness were produced and analyzed by scanning electron microscopy. It was found that the outgassing rate varies as a function of surface roughness of the TiN layer, and chambers with a rougher surface have a lower SEY.
Sponsorship	U.S. Dept. of Energy Office of Naval Res. Nat. Sci. Found
Starting Page	788
Ending Page	790
File Size	243708
Page Count	3
File Format	PDF
ISBN	0780377389
ISSN	10633928
DOI	10.1109/PAC.2003.1289478
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-05-12
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Tin Electrons Coatings Rough surfaces Surface roughness Steel Neutrons Titanium Sputtering Cathodes
Content Type	Text
Resource Type	Article

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