NDLI: Accuracy Limitations Introduced by Digital Projection Sources in Profilometric Optical Metrology Systems

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Conference on Optoelectronic and Microelectronic Materials and Devices, 2004.

2004 Conference on Optoelectronic and Microelectronic Materials and Devices

2004 Conference on Optoelectronic and Microelectronic Materials and Devices - COMMAD 04 Proceedings

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Table of contents

Growth and Characterisation of InAs/GaAs Quantum Dots Grown by MOCVD

Effect of Growth Temperature of the Confinement Layer on Cathodoluminescence Properties of GaSb/GaAs Quantum Dot Multilayer Structures

Comparison of Photocurrent Spectra of InGaAsN QD and InGaAs QW Laser Devices

Choice of Silicon Etch Processes for Opto- and Microelectronic Device Fabrication Using Inductively Coupled Plasmas

Probing the Indium Nitride Lattice Locally with the Radioisotope Probe /sup 111/ In/Cd

Composite Dielectric/Metal Sidewall Barrier for Cu/Porous Ultra Low-k Damascene Interconnects

Fabrication of 30nm T-Gate High Electron Mobility Transistors Using a Bi-Layer of PMMA and UVIII

AlGaN/AlN/GaN High Electron Mobility Transistors with Improved Carrier Transport

Studies of Hot-Electron Degradation in GaN HEMTs with Varying Gate Recess Depths

Use of a Small Lattice Mis-Matched Metamorphic Substrate to Extend the Wavelength Range of a Broadband, Polarization Insensitive Semiconductor Optical Amplifier

Numerical Analysis of All-Optical Demultiplexing Characteristics in Semiconductor Optical Amplifiers Based on Four-Wave Mixing

Enhanced fmax and Low Base Resistance in SiGe HBT with Nickel Silicidation

Low Temperature Ferromagnetism of GaMnN Grown on 6H-SiC (0001) by Molecular Beam Epitaxy

Electrical and Optical Simulation of Tris (8-hydroxyquinoline) Aluminium-Based Microcavity Organic Light Emitting Diode (MOLED)

The Effect of Thermal Annealing on the Properties of Indium Tin Oxide Thin Films

Femtosecond Nonlinear Coherence Spectroscopy of the Blue Band of GaN

Structural and Optical Characterisation of

Terahertz Absorption by Magnetoplasma Sound Wave Excitation in Semiconductor Heterostructures

Electrical and Thermal Characteristics of Multilayer Thermionic Power Devices

Planar Array Waveguide Auto-Alignment Based on Adaptive Evolution Optimization Method

Reciprocal Space Mapping of MBE-Grown HgCdTe Heterostructures

Properties of InN Grown by Remote Plasma Enhanced Chemical Vapour Deposition

Characterisation of MBE Grown HgCdTe Using Scanning Laser Microscopy

Proton Irradiation Induced Intermixing in In_xGa_1-xAs/InP Quantum Wells

Strain Evaluation of Plasma-Deposited Silicon Nitride

A Computational Study on the Growth and Composition of InGaAsP Film in a Horizontal MOCVD Reactor

Characterisation of ZnO Thin Films Grown Directly on Sapphire by PAMBE

Formation of Lead Lanthanum Zirconate Titanate Films by Heat Treatments

Constant Capacitance Deep-Level Transient Spectroscopy Study of Bulk Traps and Interface States in P Implanted Si MOS Capacitors

Thin Film Texture of Layered Molybdenum Disulphide for Photovoltaic Cells

The Fabrication of Metallic Nanotransistors

New Zener Diode Structure Between Base and the Collector Using Retrograded Profile

Noise Characterization for Heterojunction Bipolar Transistors (HBTs)

Fringing Effect of V-Gate on Heterojunction Doped-Channel Field-Effect Transistors

Functional Double-Emitter HPTs with Different Emitter-Area Ratios

Raman Scattering and X-Ray Diffraction Study of Neutron Irradiated GaN Epilayers

Finite Element Modelling of Flexural Plate Devices

Modeling the Effects of Interface Traps on Scanning Capacitance Microscopy dC/dV Measurement

Two-Photon Excited Photoluminescence in InGaN Multi-Quantum-Wells Structures

Fabrication of Photonic Crystal Membranes in Chalcogenide Glasses by Focused Ion Beam Milling

Optical Performance of Diffraction Microstructures: Design and Applications

Layer-by-Layer 3D Photonic Crystal Waveguides and Components --- Theoretical Analysis for Microwave Implementation

Porous Silicon Based Rugate Filters

Simple Fabrication Method for ZnO Nanoneedle Structures

Photon Upconversion Devices

Investigation of Surface Passivation of HgCdTe MWIR Photodiode Arrays via a Flood Illumination Technique

Mercury Cadmium Telluride/Cadmium Telluride Distributed Bragg Reflectors

Generation of Ultrasonic Waves from an Optically Driven GaAs Thin Film

Active Free Space Optics Systems for Ubiquitous User Networks

Optical Interference Suppression Using MicroPhotonic RF Filter Structure

Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors

Miniaturization and Integration of Micro/Nano-Photonic Devices for Optical Printed Circuit Board (O-PCB) and VLSI Photonic Applications

Functionalization of Porous Silicon Based Photonic Crystals with Organic Monolayers

Fabrication of Organic Photovoltaic Devices by the Layer-by-Layer Polyelectrolyte Deposition Method

Organic-Inorganic Hybrid Materials Based Planar Lightwave Circuit

Monolithic MZI All-Optical Switch with Selective Area MOVPE

Optimal Space-Bandwidth Product of Two Free-Space Optical Interconnect Configurations

Simple Thermal Model for Vertical-Cavity, Surface-Emitting Lasers

The Effect on Base Bias for InGaP/GaAs Heterojunction Phototransistors

Femtosecond Multidimensional Spectroscopy to Study Carrier Dynamics of Photonic Materials

Numerical Analysis of Optical Phase-Conjugate Characteristics of Four-Wave Mixing Signals in Semiconductor Optical Amplifiers

Measuring Multiple Parameters in a Self-Mixing Optical Feedback System

Nonlinear Absorption of Terahertz Radiation in Semiconductor Heterojunctions

Accuracy Limitations Introduced by Digital Projection Sources in Profilometric Optical Metrology Systems

A Calibration Approach for Decoupling Colour Cross-Talk Using Nonlinear Blind Signal Separation Network

Electric Field Domain Formation in Multiple Finite Superlattices Separated with Thick Barriers

Selective Area Epitaxy of InGaAs Quantum Dots for Optoelectronic Device Integration

Characterisation of InGaAs/GaAs Quantum Dot Lasers Grown by Metal-Organic Vapour Phase Epitaxy

Modeling of a Polymer 1 x 3 MMI Power Splitter for Optical Backplane

Simulation of Long-Period Rectangular-Core Waveguide Gratings

The Maximum Transmission Rate for the Silicon-Based Racetrack Microresonator

The Prediction of the Maximum FSR and Minimum HPBW for the Silicon Based Ring and Racetrack Microresonators

The Wavelength Sensor Using Optical Directional Coupler

Guard-Ring Electrode Effects on Crosstalk in Simulated 2D CMOS Compatible Vertical Photodiode Pixel Arrays

Generation of Intense Terahertz Radiation from Relativistic Laser Plasma

Finite Element Modeling of Misalignment in Interconnect Vias

Feasibilty Study of Free Space Optical Communication Link Through Atmospheric Turbulent Channel

Small Signal Intensity Modulation of Fiber Bragg Grating External Cavity Lasers

The Effect of the Higher Order Modes on the Optical Crosstalk in Free-Space Optical Interconnect

The Effect of Multiple Transverse Modes in Self-Mixing Sensors Based on Vertical-Cavity Surface-Emitting Lasers

Assembly of Bismuth Clusters into Nanowires Using Etched V-Grooves as Templates

Role of Thin GaAs Interlayer on InAs Quantum Dots Grown on InGaAsP/InP

Nanoindentation of Si Nanocrystals in $SiO_{2}$

A Proposed Nanofabrication Technique Using Optical Masks for Metastable Atom Lithography

Progress Towards the Creation of Iron Nanodots Using Atom Lithography

Influence of Layer Thickness to the Emission Spectra in Microcavity Organic Light Emitting Diodes

Physical Model and Scattering Dynamics Engineering for Intersubband Lasers and Photodetectors

Self-Assembled Lanthanum Gallate Microdots and Holes on Si

Carrier Transport Affected by X-L Transfer in a GaAs/AlAs Superlattice

The Electron Energy Spectrum and Thermionic Device Efficiency

Time Resolved and Time Integrated Photoluminescence for Study of Optical Properties of Silicon Quantum Dots

Towards Quantifying the Bandgap Energy of Indium Nitride

Defect Structure Modification in Undoped and In-doped CdTe by Cd-Rich Annealing

Stress Response of Low Temperature PECVD Silicon Nitride Thin Films to Cryogenic Thermal Cycling

An Overview of Self-Mixing Sensing Applications

Low-Voltage CMOS/BiCMOS Light Emitting Devices

Hot Electron Injection Laser Controlled Carrier-Heating Induced Gain Switching

Estimating the Parameters of Semiconductor Lasers Based on Weak Optical Feedback Interferometry

Kelvin-Probe Force Microscopy Defect Study of Ion Implanted Thermal Oxide Thin Films on Silicon

Recent Advances in the Design and Implementation of Practical Fiber Optical Parametric Amplifiers

2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)

COMMAD 2000 Proceedings. Conference on Optoelectronic and Microelectronic Materials and Devices

1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140)

1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings

Accuracy Limitations Introduced by Digital Projection Sources in Profilometric Optical Metrology Systems

Content Provider	IEEE Xplore Digital Library
Author	Baker, M.J. Chicharo, J. Jiangtao Xi Enbang Li
Copyright Year	2005
Description	Author affiliation: Sch. of Electr., Comput. & Telecommun. Eng., Wollongong Univ., NSW (Baker, M.J.; Chicharo, J.; Jiangtao Xi; Enbang Li)
Abstract	The accuracy of profilometric optical metrology systems utilising digital fringe projection (DFP) is analysed. An analytical model to describe theoretical accuracy limitation is derived and given as a function of object distance from the projector, projector resolution, projection angle and also object gradient. Associated limitations of the model are also discussed and analysed. The validity of the new model is demonstrated through practical experimentation
Starting Page	261
Ending Page	264
File Size	144962
Page Count	4
File Format	PDF
ISBN	0780388208
DOI	10.1109/COMMAD.2004.1577540
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-12-08
Publisher Place	Australia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Metrology Optical distortion Optical interferometry Biomedical optical imaging Optical sensors Analytical models Space technology Gratings Optical computing Telecommunication computing
Content Type	Text
Resource Type	Article

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