NDLI: Air friction loss of comb drive resonant micro mirrors for laser scanning display

Content Provider	IEEE Xplore Digital Library
Author	Chu Manh Hoang Hane, K.
Copyright Year	2009
Description	Author affiliation: MEMS Division of Si-Ware Systems, 3 Khalid Ibn Al-Waleed St., Heliopolis, Cairo 11361, Egypt (Hane, K.) \|\| Department of nanomechanics, Tohoku University, 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, JAPAN (Chu Manh Hoang)
Abstract	The electrostatically driven scanning micro mirrors are fabricated for the application to laser scanning display. However, a high voltage is needed for the operation. In order to operate mirror at a low voltage, we investigate the air friction loss of micro mirror with vertically driven comb in vacuum. Due to the operation in vacuum, the rotation angle increases by 52 times larger than that in atmospheric air at the same operation voltage, which corresponds to the decrease of operation voltage by a factor more than 7 at 24.5 kHz resonant frequency. The quality factor depending on air damping is investigated in pressure range from $10^{5}$ Pa to $10^{−1}$ Pa. The theoretical analyses on air friction loss are also presented.
Starting Page	125
Ending Page	126
File Size	1026064
Page Count	2
File Format	PDF
ISBN	9781424423828
DOI	10.1109/OMEMS.2009.5338561
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-08-17
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Friction Drives Resonance Mirrors Displays Laser applications Low voltage Resonant frequency Q factor Damping
Content Type	Text
Resource Type	Article

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