NDLI: Identification of a Dynamic Model for a Thin Film Deposition Process using a Self-Organizing Map

Content Provider	IEEE Xplore Digital Library
Author	Oguz, C. Gallivan, M.A.
Copyright Year	2006
Description	Author affiliation: Georgia Inst. of Technol., Atlanta (Oguz, C.; Gallivan, M.A.)
Abstract	Detailed molecular simulations, ranging from the deposition of inorganic thin films to polymerization reactions, describe the position of each atom or molecule. These simulations have high computational requirements and they produce high dimensional data. On the other hand, simple models that describe the dependence of overall material properties on process conditions are needed to design and optimize processes and it is difficult to generate these types of models from the molecular simulation data. We present an algorithm to compute a simple dynamic model for the Kinetic Monte Carlo (KMC) simulation of a thin film deposition process by using principal component analysis (PCA), self organizing map (SOM) and cell-to-cell mapping.
Starting Page	973
Ending Page	980
File Size	1206026
Page Count	8
File Format	PDF
ISBN	0780394909
DOI	10.1109/IJCNN.2006.246791
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-07-16
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Sputtering Computational modeling Polymer films Principal component analysis Atomic layer deposition Material properties Process design Design optimization Kinetic theory Monte Carlo methods
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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