NDLI: Development of an object-based equipment controller for semiconductor equipment communications

Content Provider	IEEE Xplore Digital Library
Author	Jun-Yan Deng Fan-Tien Cheng Nguyen, K.
Copyright Year	1999
Description	Author affiliation: Inst. of Manuf. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan (Jun-Yan Deng)
Abstract	SEMATECH developed the CIM framework specification to facilitate the creation of an integrated, common, flexible, modular object model leading to an open, multi-supplier CIM system environment in the semiconductor industry. However: all the equipment must comply with the SEMI SECS/GEM standards to interface with the CIM framework's machine management components. SEMI is developing an object-based equipment model (OBEM) standard to tab full advantage of the CIM framework. With OBEM, the equipment can communicate with the CIM framework directly by method invocation. This work develops OBEM-compliant object-based equipment (OBE) in the MES framework environment, such that this equipment can directly communicate with the a MES framework, without using the SECS/GEM protocol. Therefore, a systematic approach for developing this object-based system using object technology is proposed. The unified modeling language (UML) is adopted as the major tool for analyzing and developing the target system. A SECS/GEM adapter is also added on the OBE to enable the OBE to be integrated with a legacy factory which can only use SECS/GEM standards. A die bonder is used as example equipment for development demonstrations.
Starting Page	1240
Ending Page	1245
File Size	724959
Page Count	6
File Format	PDF
ISBN	0780357353
DOI	10.1109/IECON.1999.819389
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1999-11-29
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Communication system control Computer integrated manufacturing Unified modeling language Semiconductor process modeling Bonding Semiconductor device manufacture Electronics industry Standards development Protocols Production facilities
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Design and Development of Component-based Equipment Connectivity for Semiconductor Manufacturing

Developing a web-enabled equipment driver for semiconductor equipment communications

Development of a generic equipment manager for semiconductor manufacturing

An integrated application framework for a cluster tool controller for semiconductor manufacturing

Detailed simulation for semiconductor manufacturing

An expanded SEMATECH CIM framework for heterogeneous applications integration

SysML-based Simulation Framework for Semiconductor Manufacturing

Software engineering for semiconductor manufacturing equipment suppliers

Software Engineering for Semiconductor Manufacturing Equipment Suppliers

Development of an object-based equipment controller for semiconductor equipment communications

Similar Documents

Design and Development of Component-based Equipment Connectivity for Semiconductor Manufacturing

Developing a web-enabled equipment driver for semiconductor equipment communications

Development of a generic equipment manager for semiconductor manufacturing

An integrated application framework for a cluster tool controller for semiconductor manufacturing

Detailed simulation for semiconductor manufacturing

An expanded SEMATECH CIM framework for heterogeneous applications integration

SysML-based Simulation Framework for Semiconductor Manufacturing

Software engineering for semiconductor manufacturing equipment suppliers

Software Engineering for Semiconductor Manufacturing Equipment Suppliers

Development of an object-based equipment controller for semiconductor equipment communications