NDLI: Sensitivity simulation of surface acoustic wave ultraviolet detector by multi-physics method

Content Provider	IEEE Xplore Digital Library
Author	Wenbo Peng Yongning He
Copyright Year	2012
Description	Author affiliation: School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an, 710049, China (Wenbo Peng; Yongning He)
Abstract	Surface acoustic wave (SAW) ultraviolet (UV) detector uses a thin Zinc Oxide (ZnO) nanowire sensing layer to detect the UV light. Since the sensing layer is a photo-conducting film, the sharp change of conductivity of it under UV light illumination becomes the most important factor affecting the propagation velocity of SAW due to the electric-acoustic interaction. The dependence of the SAW propagation velocity on the photo-conductivity of the sensing layer is simulated by multi-physics method and the results are presented and discussed. It is found that the propagation velocity of SAW decreases with increasing the conductivity of the thin ZnO nanowire sensing layer and vice versa. Thus, the sensitivity of the SAW UV detector, which is defined as the decrease of the central frequency under UV light illumination, is investigated using the suggested simulation model. It is found that the UV sensitivity is proportional to the designed frequency of S AW device as well as the thickness of sensing layer to some degree. However, an abnormal phenomenon that there is an UV sensitivity peak on the sensitivity-thickness curve with much larger range of sensing layer thickness will occur according to the simulation results. These simulation results can help optimizing and designing the SAW UV detector.
Starting Page	1
Ending Page	4
File Size	842561
Page Count	4
File Format	PDF
ISBN	9781467321846
e-ISBN	9781467321853
DOI	10.1109/ICMMT.2012.6230472
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-05-05
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface acoustic waves Detectors Conductivity Substrates Sensitivity Zinc oxide
Content Type	Text
Resource Type	Article

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