NDLI: Fabrication of all PDMS micro pump

Content Provider	IEEE Xplore Digital Library
Author	Jeong, O.C. Konishi, S.
Copyright Year	2005
Description	Author affiliation: Center of Promotion of the COE program, Ritsumeikan Univ., Kyoto (Jeong, O.C.)
Abstract	This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the pneumatic force. The micropump consists of the three peristaltic-type actuators and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by silicon mold process and the two-step curing process for irreversible bonding of PDMS layers. The diameter and the thickness of the actuator diaphragm are 3 mm and 37 mum, respectively. The dynamic valve action of the cascade three actuators is confirmed by using video camera. The meniscus motion of the red-ink in the micro channel is also observed and its volume speed is estimated through the frame analysis of the recorded a video data. The square-wave input pressure of 37.5 kPa is applied to micro actuator for pumping test of the micro pump. The maximum tap-water suction volume speed from inlet port to micro pump is about 0.48 muL/sec at 0.3 Hz while the hydraulic pressure difference is 7 $CmH_{2}O.$ Suction volume speed due to capillary effect is about 0.09 muL/sec. The maximum meniscus speed of red-ink is about 0.83 mm/sec at 5 Hz
Starting Page	139
Ending Page	143
File Size	888721
Page Count	5
File Format	PDF
ISBN	0780394828
DOI	10.1109/MHS.2005.1589977
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-11-07
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Micropumps Actuators Testing Microchannel Joining processes Silicon Curing Bonding Valves
Content Type	Text
Resource Type	Article

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