NDLI: Array Based Test Structure for Optical-Electrical Overlay Calibration

Content Provider	IEEE Xplore Digital Library
Author	Shulver, B.J.R. Allen, R.A. Walton, A.J. Cresswell, M.W. Stevenson, J.T.M. Smith, S. Bunting, A.S. Dunare, C. Gundlach, A.M. Haworth, L.I. Ross, A.W.S. Snell, A.J.
Copyright Year	2007
Description	Author affiliation: Univ. of Edinburgh, Edinburgh (Shulver, B.J.R.; Walton, A.J.; Stevenson, J.T.M.; Smith, S.; Bunting, A.S.; Dunare, C.; Gundlach, A.M.; Haworth, L.I.; Ross, A.W.S.; Snell, A.J.)
Abstract	The novel overlay test structure reported in this paper was purposely designed to serve as an application-specific reference material. It features standard frame-in-frame optical overlay targets embedded in electrical test features and fabricated by the same process as the parts being manufactured. Optical overlay is commonly used in process control applications due to its utility for determining the relative positions of features patterned in photoresist. Electrical overlay, although it can only be measured on fully patterned test structures, is the metric of interest. Using this combined optical/electrical overlay test structure, we can derive the relationship between the routinely measured optical overlay and the electrical overlay for any specific combination of process and optical overlay tool.
Starting Page	165
Ending Page	170
File Size	5897272
Page Count	6
File Format	PDF
ISBN	142440780X
DOI	10.1109/ICMTS.2007.374476
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-03-19
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical arrays Testing Calibration Optical materials Geometrical optics Microelectronics NIST Optical microscopy Manufacturing processes Process control
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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