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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Kumar, K. Zhang, X.J. |
| Copyright Year | 2009 |
| Description | Author affiliation: Department of Biomedical Engineering, University of Texas at Austin, TX, USA (Kumar, K.; Zhang, X.J.) |
| Abstract | A CMOS-compatible 3-mask process for 2-axis self-aligned vertical comb-driven micromirror fabrication is described. Our 1024¿m diameter mirrors exhibit resonance at 2.81kHz, 669Hz, and maximum scan angles of 22°, 12° and 5.0°, 4.5° for resonant and static voltage operation on inner and outer axes. Reflectance confocal images of USAF1951 resolution target and epithelial breast tissue obtained at 3.0fps with 0.49¿m, 4.18¿m lateral and axial resolution over 200×125¿m field of view indicate the potential of these devices for large field-of-view microendoscopes. |
| Starting Page | 1015 |
| Ending Page | 1018 |
| File Size | 4013304 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424429776 |
| ISSN | 10846999 |
| e-ISBN | 9781424429783 |
| DOI | 10.1109/MEMSYS.2009.4805558 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-01-25 |
| Publisher Place | Italy |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Micromirrors Etching Fabrication Lenses Optical imaging In vivo Micromechanical devices Optical sensors Silicon compounds Stators |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering |
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