NDLI: Lateral spin valve device for magnetic reader applications fabricated by an Etch back process

Content Provider	IEEE Xplore Digital Library
Author	Smith, A.K. Stecklein, G. Jamali, M. Crowell, P.A. Wang, J.
Copyright Year	2015
Description	Author affiliation: Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA (Smith, A.K.; Jamali, M.; Wang, J.) \|\| Phys. & Astron., Univ. of Minnesota, Minneapolis, MN, USA (Stecklein, G.; Crowell, P.A.)
Abstract	A schematic design of the device with lithography defined pillars and channel is shown. The deposited film stacks have a structure of substrate/Cu(100 nm)/Co(20 nm)/Ta(4 nm). The films were deposited in vacuum with a Shamrock sputtering system. Patterning was performed using a Vistec electron beam (e-beam) lithography system. The channel was first patterned using negative resist and ion milling. After resist removal, negative resist and ion milling were used again to pattern and define the pillars. Before the e-beam resist was moved, SiO2 was deposited using e-beam evaporation to isolate the pillars and prevent shorting between top electrodes and the channel. The e-beam resist was then removed to expose the tops of the pillars for electrical contact. A final step of e-beam lithography was performed to pattern the top electrodes. E-beam evaporation was used to deposit Ti(10nm)/Au(100 nm) for the top electrodes. A schematic of the fabrication process is shown. Precise alignment between the multiple steps of e-beam lithography for the electrodes, FM pillars, and channel is essential for correct operation of the device.
Starting Page	1
Ending Page	1
File Size	576867
Page Count	1
File Format	PDF
e-ISBN	9781479973224
DOI	10.1109/INTMAG.2015.7157283
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-05-11
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Frequency modulation Magnetic recording Fabrication Lithography Resists Spin valves Magnetic tunneling
Content Type	Text
Resource Type	Article

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