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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Vaccaro, L. Aeschimann, L. Nakagawa, W. Eckert, R. Heinzelmann, H. Akiyama, T. Staufer, U. de Rooij, N.F. Herzig, H.P. |
| Copyright Year | 2003 |
| Description | Author affiliation: Inst. of Microtechnol., Neuchatel Univ., Switzerland (Vaccaro, L.) |
| Abstract | We have presented a design of silicon cantilever based scanning near-field optical microscopy (SNOM) probes with aluminum coated quartz tips which have been batch fabricated using micromachining technology. The 12 /spl mu/m high probe tips are made of SiO/sub 2/ and fabricated at the end of silicon cantilevers. A hole in the cantilever, located underneath the tip base, permits light insertion and collection through the cantilever. Transmission electron microscopy reveals a 60 nm thick polycrystalline aluminum layer that covers the tip entirely. Still, far-field measurements show the typical polarization properties of conventional SNOM aperture probes. In order to study the mechanism of light transmission through such a tip, theoretical modelling and several experiments were performed. |
| Starting Page | 969 |
| Ending Page | 970 |
| File Size | 143200 |
| Page Count | 2 |
| File Format | |
| ISBN | 0780378881 |
| ISSN | 10928081 |
| DOI | 10.1109/LEOS.2003.1253129 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-10-27 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Optical microscopy Optical polarization Probes Electromagnetic wave polarization Optical propagation Silicon Image resolution Aluminum Transmission electron microscopy Electromagnetic fields |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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