NDLI: A model for precise alignment: nanometer positioning robotic stage (NPRS)

Content Provider	IEEE Xplore Digital Library
Author	Haskiya, W.K. Kennedy, D.
Copyright Year	2003
Description	Author affiliation: Fac. of Eng., Dublin Inst. of Technol., Ireland (Haskiya, W.K.; Kennedy, D.)
Abstract	There is a great deal of research evolved around systems to deliver precise alignment in the range of nanometer and arc the second for applications, such as positioning of samples used in surface analysis, or the alignment of chip sized components for assembly etc. These technologies feature the use of small-scale motors that rotate a relevant axis to provide a precise motion to a working stage. The problem with these technologies is there small output and the dependence on moving parts, which require maintenance. The aim of this paper is to present a model which is in the initial development phase, a low cost nanometer positioning robotic stage (NPRS) for the referenced applications. The NPRS comprises of two major units, one to provide lateral motion, which consists of a series of arrays of micro robots in the form of piezoelectric wires. The micro robots have the capability to displace laterally in the surface plane (X-Y) due to the supplied voltage (piezoelectric effect). The second unit is a novel micro actuator, which provides rotation to the micro robots. The difference between the proposed NRPS and current technologies, beside its low cost, is the utilization of hair-sized wires made of smart materials as micro robots, and the utilisation of the internal forces inside smart materials to generate the necessary rotation, the expected resolution is in the range of arc the second.
Sponsorship	IEEE Robotics & Autom. Soc. IEEE Ind. Electron. Soc. Robotics Soc. Japan Soc. Instrum. & Control Eng. New Technol. Found
Starting Page	2139
Ending Page	2142
File Size	215453
Page Count	4
File Format	PDF
ISBN	0780378601
DOI	10.1109/IROS.2003.1249187
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-10-27
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Wires Costs Intelligent robots Voltage Piezoelectric effect Microactuators Piezoelectricity Ferroelectric materials Actuators Assembly systems
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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