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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yu Sun Piyabongkarn, D. Sezen, A. Nelson, B.J. Rajamani, R. Schoch, R. Potasek, D.P. |
| Copyright Year | 2002 |
| Description | Author affiliation: Dept. of Mech. Eng., Minnesota Univ., Minneapolis, MN, USA (Yu Sun; Piyabongkarn, D.; Sezen, A.; Nelson, B.J.; Rajamani, R.) |
| Abstract | This paper presents the design, fabrication, modeling, and control of a dual-axis electrostatic microactuation system. To form the 3D structure only three masks are used on silicon-on-insulator wafers using deep reactive ion etching. The bulk micromachined high aspect ratio structure produces large force output, achieving the full motion range with 10.7 V in x and 70.1 V in y. To provide position feedback for high precision manipulation, a capacitive position sensing mechanism, capable of resolving position changes up to 5 /spl mu/m with a resolution of 0.01 /spl mu/m in both x and y is integrated. A nonlinear model inversion technique is proposed for nonlinear electrostatic microactuation system identification and improving system linearity and response. The effectiveness of the technique was verified in experiments. Applications of the system include micromanipulation and microassembly. |
| Sponsorship | IEEE Robotics & Autom. Soc. IEEE Ind. Electron. Soc. Robotics Soc. Japan Soc. Instrum. & Control Eng. INRIA Rhone-Alpes Grenoble EPFL Lausanne |
| Starting Page | 1796 |
| Ending Page | 1801 |
| File Size | 616775 |
| Page Count | 6 |
| File Format | |
| ISBN | 0780373987 |
| DOI | 10.1109/IRDS.2002.1044016 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2002-09-30 |
| Publisher Place | Switzerland |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Electrostatics Microactuators Atomic force microscopy Servomotors Micromachining Silicon on insulator technology Fabrication Etching Linearity Microassembly |
| Content Type | Text |
| Resource Type | Article |
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