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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Sangwoo Lee Sangjun Park Sangwoo Yi Sangchul Lee Dong-II Dan Cho Byeoungju Ha Yongsoo Oh Cimoo Song |
| Copyright Year | 1999 |
| Description | Author affiliation: Sch. of Electr. Eng., Seoul Nat. Univ., South Korea (Sangwoo Lee) |
| Abstract | In fabricating microelectromechanical systems (MEMS), bulk micromachining using [100] and [110] single crystal silicon and surface micromachining using polycrystalline silicon are used. However, both micromachining methods have drawbacks, and micromachining actuating or sensing MEMS using single crystal silicon has been an active research topic in resent years. This paper presents electrostatic actuation of a resonator fabricated by the SBM (surface/bulk micromachining) process. The SBM process allows fabricating released structures in single crystal silicon. To fabricate electrodes and to electrically isolate them, a junction isolation method using reverse-biased diodes is developed. The breakdown voltage of this isolation method is measured to be larger than 150 volts. A SBM processed microresonator is actuated at 36 kHz. A displacement of several /spl mu/m is achieved in atmosphere with a 20 volts peak-to-peak supply. |
| Starting Page | 1057 |
| Ending Page | 1062 |
| File Size | 766407 |
| Page Count | 6 |
| File Format | |
| ISBN | 0780351843 |
| DOI | 10.1109/IROS.1999.812820 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1999-10-17 |
| Publisher Place | South Korea |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Electrostatic actuators Micromachining Silicon Micromechanical devices Microelectromechanical systems Electrodes Diodes Atmospheric measurements Electrostatic measurements Microcavities |
| Content Type | Text |
| Resource Type | Article |
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