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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Ribas, R.P. Behrens, F.H. |
| Copyright Year | 1999 |
| Description | Author affiliation: Inst. de Inf, PUC Campinas, Sao Paulo, Brazil (Ribas, R.P.) |
| Abstract | The increasing interest in microsystems technology or MEMS (Micro-Electro-Mechanical Systems) is a result of the progress in the integrated circuit (IC) fabrication domain, in the last decades. Nowadays, a great effort is being made to construct non-electrical parts on a single chip in order to obtain monolithic multi-functional smart sensors. For this, the CAD tools must also support such a multi-domain design environment, including from system behavior description and simulation to a unified layout construction. An approach to microsystems codesign is presented, and some back-end tools (layout level) such as layout generators, cross-section and 3D viewers, and etching simulators are already available. |
| Starting Page | 46 |
| Ending Page | 49 |
| File Size | 95495 |
| Page Count | 4 |
| File Format | |
| ISBN | 076950387X |
| DOI | 10.1109/SBCCI.1999.802965 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1999-10-02 |
| Publisher Place | Brazil |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Books Grounding Electronic equipment Power systems Integrated circuit technology Micromechanical devices Microelectromechanical systems Fabrication Intelligent sensors Design automation |
| Content Type | Text |
| Resource Type | Article |
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