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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Aggour, K. Lijie Li |
| Copyright Year | 2012 |
| Description | Author affiliation: Multidisciplinary Nanotechnology Centre, College of Engineering, Swansea University, SA2 8PP, UK (Aggour, K.; Lijie Li) |
| Abstract | This work presents the AC analysis of smart microactuator system. The electro-thermal microactuator is modelled in VHDL-AMS and integrated with its driving circuit using Cadence AMS tools. A new design approach is used to generate a variable low frequency oscillator signal. The high voltage driving AC signal is generated by a DC/DC converter biasing an amplifier fed by the variable frequency oscillator. The simulation shows that the MEMS actuator can reach its peak and ambient temperature when powered by a low frequency pulse while the beams of the actuator are not capable to reach their full sweep when the pulse width is low. |
| Starting Page | 194 |
| Ending Page | 197 |
| File Size | 661407 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781467303408 |
| e-ISBN | 9781467303422 |
| DOI | 10.1109/ICIT.2012.6209937 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-03-19 |
| Publisher Place | Greece |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Integrated optics Optical pumping Optical sensors Analytical models Hardware design languages Oscillators |
| Content Type | Text |
| Resource Type | Article |
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