NDLI: Integration of AlN micromechanical contour-mode technology filters with three-finger dual beam AlN MEMS switches

Content Provider	IEEE Xplore Digital Library
Author	Sinha, N. Mahameed, R. Chengjie Zuo Piazza, G.
Copyright Year	2009
Description	Author affiliation: Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, USA (Sinha, N.) \|\| Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, USA (Mahameed, R.; Chengjie Zuo; Piazza, G.)
Abstract	In this paper, we present the first demonstration of the monolithic integration of Aluminum Nitride (AlN) micromechanical contour mode technology filters with dual-beam actuated MEMS AlN switches. This integration has lead to the development of the first prototype of a fully-integrated all-mechanical switchable filter. Integration has been demonstrated by using AlN contour-mode MEMS filters at two center frequencies, i.e. 98.7 and 279.9 MHz. The micromechanical switch design used here is a novel three-finger dual-beam topology that improves the isolation and insertion loss of the switch by decreasing the parasitic coupling between the DC and RF signals over a previous AlN MEMS dual beam design. With the use of just one switch fabricated right next to, and integrated with the filter, the AlN MEMS filter is effectively turned off and its pass-band transmission is lowered to the out of band level at 279.9 MHz.
Starting Page	1
Ending Page	4
File Size	2831374
Page Count	4
File Format	PDF
ISBN	9781424435111
ISSN	10756787
DOI	10.1109/FREQ.2009.5168131
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-04-20
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Microswitches Switches Signal design Band pass filters Monolithic integrated circuits Aluminum nitride Prototypes Frequency Topology
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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