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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Josse, F. Bender, F. Cernosek, R.W. Zinszer, K. |
| Copyright Year | 2001 |
| Description | Author affiliation: Dept. of Electr. & Comput. Eng., Marquette Univ., Milwaukee, WI, USA (Josse, F.) |
| Abstract | The design and performance of guided shear horizontal surface acoustic wave (guided SH-SAW) devices on LiTaO/sub 3/ substrates are investigated for high sensitivity biochemical sensor in liquids. The device sensitivity to mass and viscoelastic loading is increased using a thin guiding layer of (cross-linked or cured) poly(methyl methacrylate) (PMMA) or cyanoethylcellulose (CEC) on the device surface. The devices have been tested in biosensing and chemical sensing experiments. Suitable design principles for these applications are discussed with regard to wave guidance, electrical passivation of the interdigital transducers (IDT) from the liquid environments, acoustic loss and sensor signal distortion. In biosensing experiments, using optimal PMMA thickness of approximately 2 /spl mu/m, mass sensitivity greater than 1500 Hz/(ng/mm/sup 2/) is demonstrated, resulting in a minimum detection limit less than 20 pg/mm/sup 2/. For chemical sensor experiments, it is found that optimal waveguide thickness must be modified to account for the chemically sensitive layer. |
| Sponsorship | IEEE Ultrasonics, Ferroelectr., Frequency Control Soc. |
| Starting Page | 454 |
| Ending Page | 461 |
| File Size | 734414 |
| Page Count | 8 |
| File Format | |
| ISBN | 0780370287 |
| ISSN | 10756787 |
| DOI | 10.1109/FREQ.2001.956273 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2001-06-08 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Biosensors Acoustic sensors Acoustic signal detection Surface acoustic wave devices Acoustic waves Chemical sensors Liquids Viscosity Elasticity Acoustic testing |
| Content Type | Text |
| Resource Type | Article |
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