NDLI: UHF AT-cut crystal resonators operating in the fundamental mode

Content Provider	IEEE Xplore Digital Library
Author	Ishii, O. Iwata, H. Sugano, M. Ohshima, T.
Copyright Year	1998
Description	Author affiliation: Toyo Commun. Equipment Co. ltd., Kanagawa, Japan (Ishii, O.)
Abstract	The UHF AT-cut crystal resonators operating in the fundamental mode were manufactured using both wet chemical etching technology with high etching rate and reactive ion etching technology with low etching rate for high-precision thickness adjustment in combination. In order to decrease the thermal stress at the interface between the crystal and a electrode, which is caused by a difference of thermal expansion coefficients, a gold electrode was selected as this material has the approximate thermal expansion coefficient as the crystal. The electrode thickness was also examined to have the most suitable plate back ratio. The ratio of the film thickness of the reverse side electrode to the thickness of the crystal substrate (9%), together with the film thickness of the main electrode (60 nm), creates a resonance at center frequency of 622 MHz with a favorable frequency temperature characteristic of frequency shifts within 110 ppm at the temperature range from -35/spl deg/C to +85/spl deg/C. Furthermore, the application of this resonator to the configuration of VCXO for the Colpitts oscillation circuit produced a frequency control characteristic of /spl plusmn/120 ppm/+2.5 V/spl plusmn/2 V and a phase noise characteristic of -100 dBc/Hz at an offset frequency of 1 kHz.
Starting Page	975
Ending Page	980
File Size	425933
Page Count	6
File Format	PDF
ISBN	0780343735
ISSN	10756787
DOI	10.1109/FREQ.1998.718018
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-05-29
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrodes Wet etching Thermal stresses Chemical technology Thermal expansion Frequency Temperature distribution Manufacturing Gold Crystalline materials
Content Type	Text
Resource Type	Article

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