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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Poulton, C.V. Xiaoge Zeng Wade, M.T. Shainline, J.M. Popovic, M.A. |
| Copyright Year | 2014 |
| Description | Author affiliation: Dept. of Electr., Comput., & Energy Eng., Univ. of Colorado, Boulder, CO, USA (Poulton, C.V.; Xiaoge Zeng; Wade, M.T.; Shainline, J.M.; Popovic, M.A.) |
| Abstract | Summary form only given. We demonstrate linear photonic crystal (PhC) microcavities with thermo-optic tuning capability realized in the IBM 45nm (12SOI) silicon-on-insulator CMOS microelectronics fabrication process. The PhC microcavities can be used as efficient integrated optical wavelength add-drop filters. The cavity is created in the monocrystalline silicon transistor body layer of the CMOS process, with a resonance wavelength of 1520 nm. The cavity device layer is doped to lower the electrical resistance so that current sent through it generates local heating with reasonable drive voltages. The dissipated heat increases the temperature of the cavity and, because of the high thermo-optic coefficient of silicon, increases the index of refraction, shifting the resonance wavelength. This method should be more effective than an adjacent metal or polysilicon heater because the hot spot is right in the middle of the optical mode of the cavity. |
| Starting Page | 1 |
| Ending Page | 1 |
| File Size | 882423 |
| Page Count | 1 |
| File Format | |
| e-ISBN | 9781479931200 |
| DOI | 10.1109/USNC-URSI-NRSM.2014.6928008 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2014-01-08 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Optical design Optical device fabrication Photonic crystals Cavity resonators Microcavities CMOS integrated circuits Optical refraction |
| Content Type | Text |
| Resource Type | Article |
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