Please wait, while we are loading the content...
| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Braun, L. Franquet, O. Daniau, W. Baron, T. Courjon, E. Ballandras, S. |
| Copyright Year | 2014 |
| Description | Author affiliation: Frec|n|sys SAS, Besancon, France (Courjon, E.; Ballandras, S.) || AR Electron. SAS, Besancon, France (Braun, L.; Franquet, O.) || FEMTO-ST, UFC, Besancon, France (Daniau, W.; Baron, T.) |
| Abstract | The need of fabricating Surface Acoustic Wave (SAW) devices with an accurate frequency definition has lead SAW devices manufacturers to develop trimming processes. A current approach of trimming process widely used to decrease the frequency of SAW devices consists in etching the substrate between electrodes using an appropriate plasma. According to this principle, we have developed such a process using a standard reactive ion etching (RIE) machine, to trim narrow-band longitudinally-coupled resonator filters (LCRF) operating at gigahertz-frequencies. Such filters are based on double-resonance structures exploiting the exchange of acoustic energy between two transducers through a coupling cavity via evanescent waves. The trimming process consists in measuring the passband on the filter for the estimation of the offset between the targeted and effective central frequencies. The amount of substrate to be etched is then deduced using abacuses computed using our coupled finite element/boundary element analysis tool. The application of the process to the devices for different durations shows a rate of less than 20 ppm of frequency per second. Considering such an etching rate, the process reveals accurate enough for meeting specified frequencies with an accuracy of about 50 ppm. Results, demonstrating the preservation of the transfer function. A deeper analysis of the transfer function shows however a diminution of the bandwidth and an enlargement of the stop-band in the transducers and in the coupling reflectors, which corresponds to a rise of the reflecting coefficient conforming theoretical predictions. At last, this rise can induced significant losses for frequency shifts larger than 1000 ppm, demonstrated theoretically and experimentally. For a frequency shifts smaller than 100 ppm, the trimming process yields an almost linear correction relation between the etching depth and the relative frequency shifts, conferring a very trustful character to the process. Finally, the very interest of the approach is the possibility for single (or very few) filter trimming once bounded into standard ceramic packages. |
| Starting Page | 9 |
| Ending Page | 11 |
| File Size | 767210 |
| Page Count | 3 |
| File Format | |
| e-ISBN | 9781479952526 |
| DOI | 10.1109/EFTF.2014.7331414 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2014-06-23 |
| Publisher Place | Switzerland |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Couplings Band-pass filters Resonator filters Rayleigh waves Resonant frequency Transfer functions Plasma etching Surface acoustic wave devices Trimming process Etching |
| Content Type | Text |
| Resource Type | Article |
National Digital Library of India (NDLI) is a virtual repository of learning resources which is not just a repository with search/browse facilities but provides a host of services for the learner community. It is sponsored and mentored by Ministry of Education, Government of India, through its National Mission on Education through Information and Communication Technology (NMEICT). Filtered and federated searching is employed to facilitate focused searching so that learners can find the right resource with least effort and in minimum time. NDLI provides user group-specific services such as Examination Preparatory for School and College students and job aspirants. Services for Researchers and general learners are also provided. NDLI is designed to hold content of any language and provides interface support for 10 most widely used Indian languages. It is built to provide support for all academic levels including researchers and life-long learners, all disciplines, all popular forms of access devices and differently-abled learners. It is designed to enable people to learn and prepare from best practices from all over the world and to facilitate researchers to perform inter-linked exploration from multiple sources. It is developed, operated and maintained from Indian Institute of Technology Kharagpur.
Learn more about this project from here.
NDLI is a conglomeration of freely available or institutionally contributed or donated or publisher managed contents. Almost all these contents are hosted and accessed from respective sources. The responsibility for authenticity, relevance, completeness, accuracy, reliability and suitability of these contents rests with the respective organization and NDLI has no responsibility or liability for these. Every effort is made to keep the NDLI portal up and running smoothly unless there are some unavoidable technical issues.
Ministry of Education, through its National Mission on Education through Information and Communication Technology (NMEICT), has sponsored and funded the National Digital Library of India (NDLI) project.
| Sl. | Authority | Responsibilities | Communication Details |
|---|---|---|---|
| 1 | Ministry of Education (GoI), Department of Higher Education |
Sanctioning Authority | https://www.education.gov.in/ict-initiatives |
| 2 | Indian Institute of Technology Kharagpur | Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project | https://www.iitkgp.ac.in |
| 3 | National Digital Library of India Office, Indian Institute of Technology Kharagpur | The administrative and infrastructural headquarters of the project | Dr. B. Sutradhar bsutra@ndl.gov.in |
| 4 | Project PI / Joint PI | Principal Investigator and Joint Principal Investigators of the project |
Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon |
| 5 | Website/Portal (Helpdesk) | Queries regarding NDLI and its services | support@ndl.gov.in |
| 6 | Contents and Copyright Issues | Queries related to content curation and copyright issues | content@ndl.gov.in |
| 7 | National Digital Library of India Club (NDLI Club) | Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach | clubsupport@ndl.gov.in |
| 8 | Digital Preservation Centre (DPC) | Assistance with digitizing and archiving copyright-free printed books | dpc@ndl.gov.in |
| 9 | IDR Setup or Support | Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops | idr@ndl.gov.in |
|
Loading...
|