NDLI: A Wireless Thin Contact Stress Sensor Based on Surface Acoustic Wave Resonator in ZnO/Si Structure

Content Provider	IEEE Xplore Digital Library
Author	Dong Chen Jiexiong Ding Li Du Guangmin Liu JianGuo He
Copyright Year	2011
Abstract	A sensor based on surface acoustic wave resonator (SAWR) in ZnO/Si structure for wirelessly monitoring contact stress in thin gap is analyzed. Firstly, the scheme of SAWR stress sensor and surface effective permittivity for analyzing SAW in ZnO/Si structure are introduced. Then, the phase velocity and electromechanical coupling coefficient for Rayleigh mode as well as Sezawa mode are obtained in ZnO/Si structure. Next, the stress sensitivity of the sensor is estimated by combing changed elastic constants with surface effective permittivity for the Sezawa mode. The results show that the sensor exhibits good linear relation between applied stress and relative frequency shift with the adjustable stress sensitivity for different thickness of diaphragm. Finally, the temperature sensitivity of the stress sensor is estimated to -31ppm/ 0C for temperatures ranging from 20 to 60 0C. To reduce temperature disturbance, a differential measurement configuration is presented.
Starting Page	50
Ending Page	53
File Size	315707
Page Count	4
File Format	PDF
ISBN	9780769545196
DOI	10.1109/IMCCC.2011.22
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-10-21
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Wireless Sensitivity Surface acoustic waves Contact stress Zinc oxide Silicon ZnO/Si Stress Substrates Strain SAWR
Content Type	Text
Resource Type	Article

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