NDLI: The rotating substrate holder of sputtering deposition for effective growth of thin copper films

Content Provider	IEEE Xplore Digital Library
Author	Suwannatus, S. Pakdee, U.
Copyright Year	2015
Description	Author affiliation: Dept. of Phys., Kasetsart Univ., Bangkok, Thailand (Suwannatus, S.; Pakdee, U.)
Abstract	The homemade sputtering process was devised by a team of researchers. The copper bulk with nominal purity of 99.9% was used as a cathode target. Thin copper films were fabricated on glass slides by direct current sputtering (DC-sputtering) in vacuum chamber with base pressure of typically 10-2 mbar under argon gas (Ar). The effects of coated distances from cathode target to holder as 4, 7 and 10 cm on the morphology and crystallinity of thin Cu films were investigated. The system was designed and developed to improve the performance of coating thin film. A rotating holder was used as a supported function for the effective growth of the films. The holder was rotated with a constant angular speed of 30 rpm. The samples were examined with scanning electron microscope (SEM), atomic force microscope (AFM) and X-ray diffractometer (XRD). The experimental data revealed that the surface roughness and the crystallinity of thin copper films were improved by rotating function of a substrate holder.
Starting Page	547
Ending Page	550
File Size	901747
Page Count	4
File Format	PDF
e-ISBN	9781467376709
DOI	10.1109/TICST.2015.7369414
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-11-04
Publisher Place	Thailand
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Rotating substrate holder Thin copper film Films Surface roughness Rough surfaces Copper Surface treatment Sputtering Substrates
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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