NDLI: PiezoNEMS: Semiconductor nanowires and heterostructures for sensing and energy harvesting

Content Provider	IEEE Xplore Digital Library
Author	Montes, L. Xu, X. Potie, A. Bercu, B. Hinchet, R. Rochette, F. Ardila, G. Morfouli, P. Mouis, M. Songmuang, R. Salem, B. Baron, T.
Copyright Year	2012
Description	Author affiliation: IMEP-Lahc (Grenoble INP, UJF, U.Savoie, CNRS), Minatec, France (Montes, L.; Xu, X.; Potie, A.; Bercu, B.; Hinchet, R.; Rochette, F.; Ardila, G.; Morfouli, P.; Mouis, M.) \|\| I. Néel, Grenoble, France (Songmuang, R.) \|\| LTM, Grenoble, France (Salem, B.; Baron, T.)
Abstract	In this paper we present new concepts of piezoresistive and piezoelectric devices based on nanowires and heterostructured nanowires, that could be integrated in future IC devices for sensing and/or mechanical energy harvesting. In a first part we introduce a new method to investigate the piezoresistive properties of nanodevices such as 50nm Fully Depleted SOI field effect transistors and nanowires, based on an ultrathin membrane. This new technique is used to apply large strain in the devices (up to a few hundreds of GPa), and can also be used for dynamic studies. While in transistors and nanowires the change in mobility or resistance is limited to a few %, the applied stress can drastically change the electrical properties of tunnel junction nanowires or heterostructured nanowires. In such devices, the current change could be in the order of a few decades, leading to ultra-sensitive strain or pressure sensors. In a second part, we study the electromechanical properties of different kinds of individual piezoelectric nanowires, such as ZnO and GaN, and GaN/AlN/GaN heterostructured nanowires. We present an original technique to study the electromechanical properties of such piezoelectric nanowires, based on an AFM set-up. In particular we show a large enhancement of the piezoelectric properties of nanowires and even more drastically when considering hetero-structured nanowires.
Starting Page	69
Ending Page	74
File Size	2071483
Page Count	6
File Format	PDF
ISBN	9781467317177
e-ISBN	9781467317177
DOI	10.1109/ISCDG.2012.6359987
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-09-24
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Piezoresistivity Nanoelectromechanical systems Layout Mechanical energy harvesting Piezoelectricity Nanowire Nanoscale devices Nanowires Sensors Gallium nitride Antennas
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Energy harvesting from nanostructures

Scaling prospects in mechanical energy harvesting using piezoelectric nanostructures

Piezoelectric soft MEMS for tactile sensing and energy harvesting

2DEG electrodes for piezoelectric transduction of AlGaN/GaN MEMS resonators

Silicon carbide for MEMS and NEMS - an overview

Piezoresistivity Characterization of Synthetic Silicon Nanowires Using a MEMS Device

Investigations on energy scavenging methods using MEMS devices

Devices based on semiconductor nanowires

Single semiconducting zinc oxide nanowire based device for thermal and airflow sensing

PiezoNEMS: Semiconductor nanowires and heterostructures for sensing and energy harvesting

Similar Documents

Energy harvesting from nanostructures

Scaling prospects in mechanical energy harvesting using piezoelectric nanostructures

Piezoelectric soft MEMS for tactile sensing and energy harvesting

2DEG electrodes for piezoelectric transduction of AlGaN/GaN MEMS resonators

Silicon carbide for MEMS and NEMS - an overview

Piezoresistivity Characterization of Synthetic Silicon Nanowires Using a MEMS Device

Investigations on energy scavenging methods using MEMS devices

Devices based on semiconductor nanowires

Single semiconducting zinc oxide nanowire based device for thermal and airflow sensing

PiezoNEMS: Semiconductor nanowires and heterostructures for sensing and energy harvesting